发明授权
- 专利标题： Field emission type electron gun comprising single fibrous carbon electron emitter and operating method for the same
- 专利标题（中）： 包括单纤维碳电子发射体的场致发射型电子枪及其操作方法
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申请号： US11523001申请日： 2006-09-19
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公开(公告)号： US07777404B1公开(公告)日： 2010-08-17
- 发明人: Tadashi Fujieda , Kishio Hidaka , Mitsuo Hayashibara
- 申请人： Tadashi Fujieda , Kishio Hidaka , Mitsuo Hayashibara
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2005-273051 20050921
- 主分类号： H01J19/06
- IPC分类号： H01J19/06 ; H01K1/04
摘要：
Means for achieving the purpose of the present invention includes an field emission type cathode composed of a single fibrous carbon substance and a conductive substrate supporting the same; an extraction apparatus for causing field emission of electrons; and an accelerator for accelerating electrons, wherein the aforementioned field emission type electron gun is further contains means for heating the aforementioned field emission cathode, and means for applying the voltage of the polarity that does not allow the aforementioned field emission type cathode to field-emit electrons.Thereby, the amorphous carbon is removed from the tip end of the fibrous carbon substance of the field emission type electron gun, without the tip end thereof being damaged.
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