Field emission electron gun and electron beam applied device using the same
    1.
    发明授权
    Field emission electron gun and electron beam applied device using the same 有权
    场发射电子枪和电子束施加装置使用相同

    公开(公告)号:US07732764B2

    公开(公告)日:2010-06-08

    申请号:US11831989

    申请日:2007-08-01

    摘要: The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.

    摘要翻译: 本发明的目的是使得能够容易地调整由其上安装有由纤维状碳材料构成的电子枪的场发射电子枪的电子束的光轴。 此外,还要获得能量扩散比电子枪窄的电子束。 此外,还提供安装在其上的高分辨率电子束施加装置的场致发射电子枪。 用于实现本发明的目的的手段在于,在场发射电子枪中包括具有带隙的材料的纤维状碳材料包括由纤维状碳材料构成的电子源和用于 支撑纤维状碳材料,用于场发射电子的提取器和用于加速电子的加速器。 此外,还将场致发射电子枪应用于各种电子束施加装置。

    FIELD EMISSION ELECTRON GUN AND ELECTRON BEAM APPLIED DEVICE USING THE SAME
    4.
    发明申请
    FIELD EMISSION ELECTRON GUN AND ELECTRON BEAM APPLIED DEVICE USING THE SAME 有权
    现场发射电子枪和使用该电子枪的电子束应用装置

    公开(公告)号:US20080029700A1

    公开(公告)日:2008-02-07

    申请号:US11831989

    申请日:2007-08-01

    摘要: The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.

    摘要翻译: 本发明的目的是使得能够容易地调整由其上安装有由纤维状碳材料构成的电子枪的场发射电子枪的电子束的光轴。 此外,还要获得能量扩散比电子枪窄的电子束。 此外,还提供安装在其上的高分辨率电子束施加装置的场致发射电子枪。 用于实现本发明的目的的手段在于,在场发射电子枪中包括具有带隙的材料的纤维状碳材料包括由纤维状碳材料构成的电子源和用于 支撑纤维状碳材料,用于场发射电子的提取器和用于加速电子的加速器。 此外,还将场致发射电子枪应用于各种电子束施加装置。

    Field emission gun and electron beam instruments
    5.
    发明授权
    Field emission gun and electron beam instruments 有权
    场发射枪和电子束仪器

    公开(公告)号:US07151268B2

    公开(公告)日:2006-12-19

    申请号:US11059511

    申请日:2005-02-17

    IPC分类号: H01J37/073

    摘要: A field-emission electron gun includes a field-emission cathode including a single fiber-like carbon substance and an electrically-conductive substrate for supporting the substance, an extractor for field-emitting electrons, an accelerating electrode for accelerating the electrons, an extracting power-supply for applying extracting voltage to the extractor, an accelerating power-supply for applying accelerating voltage to the accelerating electrode, and a unit for detecting and monitoring a part of emission current. In this field-emission electron gun, if emission-variation amount has become larger than a predetermined value, the extracting voltage is automatically boosted for a constant length of time, thereby increasing the emission current up to a predetermined value. Further, extracting voltage at the time of boosting the extracting voltage, voltage-boosting time, and the emission current are recorded, then being feed-backed to voltage-boosting conditions for the next-time extracting voltage. Moreover, the accelerating voltage is varied in correspondence with the voltage-boosting of the extracting voltage.

    摘要翻译: 场致发射电子枪包括:包含单纤维状碳物质的场致发射阴极和用于支撑物质的导电基板,用于场发射电子的提取器,用于加速电子的加速电极,提取电力 - 用于向提取器施加提取电压,用于向加速电极施加加速电压的加速电源,以及用于检测和监测部分发射电流的单元。 在该场发射电子枪中,如果发射变化量大于预定值,则提取电压自动升高恒定的时间长度,从而将发射电流提高到预定值。 此外,记录提升电压提升时的提取电压,升压时间和发射电流,然后将其反馈到下一次提取电压的升压条件。 此外,加速电压根据提取电压的升压而变化。

    Submicron size metal deposit apparatus
    6.
    发明申请
    Submicron size metal deposit apparatus 审中-公开
    亚微米尺寸金属沉积设备

    公开(公告)号:US20050072360A1

    公开(公告)日:2005-04-07

    申请号:US10910359

    申请日:2004-08-04

    摘要: The method by which a small amount of gaseous organic metal is loaded in a vacuum atmosphere, the gaseous organic metal is decomposed by irradiation with an electron beam, and metal components are deposited on a beam-irradiated portion has the problem that the deposited portion is rendered amorphous by hydrocarbon contamination, so that the conductivity and strength of the deposit considerably deteriorate. The invention solves the problem by a method by which the gaseous organic metal is decomposed by irradiation with the electron beam and the metal components are deposited on the beam-irradiated portion, wherein the deposited portion is irradiated with a laser, heated by a heater, or irradiated with infrared rays during deposition, thereby allowing the molding of a crystalline metal deposit with excellent conductivity and strength.

    摘要翻译: 在真空气氛中加载少量气体有机金属的方法,通过用电子束照射来分解气态有机金属,并且在束照射部分上沉积金属成分具有沉积部分为 通过碳氢化合物污染使其呈现无定形,使得沉积物的导电性和强度显着劣化。 本发明通过用电子束照射分解气态有机金属并将金属成分沉积在束照射部分上的方法解决了该问题,其中沉积部分被激光照射,加热器加热, 或在沉积期间用红外线照射,从而允许成型具有优异的导电性和强度的结晶金属沉积物。

    Field emission electron gun and electron beam apparatus using the same
    9.
    发明申请
    Field emission electron gun and electron beam apparatus using the same 审中-公开
    场发射电子枪和使用其的电子束装置

    公开(公告)号:US20060001350A1

    公开(公告)日:2006-01-05

    申请号:US11169785

    申请日:2005-06-30

    IPC分类号: H01J1/304

    摘要: A field emission electron gun has a field emission cathode composed of a carbon fiber and a conductive base for supporting the carbon fiber, an extractor for causing the field emission of electrons, and an accelerator for accelerating the electrons. The carbon fiber contains at least one of trivalent and pentavalent elements. In particular, the trivalent and pentavalent elements are boron and/or nitrogen. The content of at least one of boron and nitrogen in the carbon fiber is 0.1% to 5% at an atomic weight ratio of the contained element to carbon. The diameter of the carbon fiber is 20 nm to 200 nm. Such an electron gun can have a high-brightness electron beam with a narrow energy width. The field emission electron gun is applied to various electron beam apparatus.

    摘要翻译: 场发射电子枪具有由碳纤维和用于支撑碳纤维的导电基底构成的场发射阴极,用于引起电子的场发射的提取器和用于加速电子的加速器。 碳纤维含有三价元素和五价元素中的至少一种。 特别地,三价和五价元素是硼和/或氮。 碳纤维中的硼和氮中的至少一种的含量以含有元素与碳的原子重量比为0.1〜5%。 碳纤维的直径为20nm〜200nm。 这种电子枪可以具有具有窄能量宽度的高亮度电子束。 场发射电子枪适用于各种电子束装置。