摘要:
The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.
摘要:
An electron emitting element having a cap portion 103 with a closed structure and a columnar axis portion 101a comprising a tubular material composed mostly of carbon and a conductive base material for immobilizing the tubular material, characterized in that; the cap portion 103 includes a plurality of five-membered ring structures 104 made by atoms which constitute the tubular material and the distance between the five-membered ring structures 104 is 30 nm or more.
摘要:
The purpose of the present invention is to provide an easy-to-manufacture electromagnetic wave absorption material usable from submillimeter wave region to millimeter wave region with an excellent radio wave absorbing performance and a variety of usage thereof.The present invention is characterized by an electromagnetic wave absorption material comprised of a dispersions of at least one of the materials: a multi-layer hollow globule of carbon, a schungite carbon, and the schungite ore; mixed into a matter having a high electrical resistivity. The invention is further characterized by an electronic device, an optical transmission module, an optical reception module, a high frequency telecommunication equipment, and a stop-free automated tollgate system, wherein at least a part of their board, electronic element, and circuit wiring are covered with said electromagnetic wave absorption material.
摘要:
The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.
摘要:
A field-emission electron gun includes a field-emission cathode including a single fiber-like carbon substance and an electrically-conductive substrate for supporting the substance, an extractor for field-emitting electrons, an accelerating electrode for accelerating the electrons, an extracting power-supply for applying extracting voltage to the extractor, an accelerating power-supply for applying accelerating voltage to the accelerating electrode, and a unit for detecting and monitoring a part of emission current. In this field-emission electron gun, if emission-variation amount has become larger than a predetermined value, the extracting voltage is automatically boosted for a constant length of time, thereby increasing the emission current up to a predetermined value. Further, extracting voltage at the time of boosting the extracting voltage, voltage-boosting time, and the emission current are recorded, then being feed-backed to voltage-boosting conditions for the next-time extracting voltage. Moreover, the accelerating voltage is varied in correspondence with the voltage-boosting of the extracting voltage.
摘要:
The method by which a small amount of gaseous organic metal is loaded in a vacuum atmosphere, the gaseous organic metal is decomposed by irradiation with an electron beam, and metal components are deposited on a beam-irradiated portion has the problem that the deposited portion is rendered amorphous by hydrocarbon contamination, so that the conductivity and strength of the deposit considerably deteriorate. The invention solves the problem by a method by which the gaseous organic metal is decomposed by irradiation with the electron beam and the metal components are deposited on the beam-irradiated portion, wherein the deposited portion is irradiated with a laser, heated by a heater, or irradiated with infrared rays during deposition, thereby allowing the molding of a crystalline metal deposit with excellent conductivity and strength.
摘要:
An amorphous carbon layer sticking on a carbon nanotube surface is remarkably reduced when a carbon nanotube is joined to a conductive substrate by bringing a single fibrous carbonaceous material in contact with the tip of the conductive substrate and covering at least a part of the contact portion with a conductive material while at lest either of the fibrous carbonaceous material or the conductive substrate is heated in a vacuum.
摘要:
The present invention provides a cantilever having a base fixed to an inspecting apparatus, a beam protruding from the base, and a probe fixed to an end of the beam, wherein: the probe is formed by use of a carbon nanotube; and the probe is fixed by metal layers from at least two directions when the cantilever is operated, the probe protrudes in a direction in which a sample is fixed. It is possible to prevent the probe from warping and suppress image failures during observation of a sample.
摘要:
A field emission electron gun has a field emission cathode composed of a carbon fiber and a conductive base for supporting the carbon fiber, an extractor for causing the field emission of electrons, and an accelerator for accelerating the electrons. The carbon fiber contains at least one of trivalent and pentavalent elements. In particular, the trivalent and pentavalent elements are boron and/or nitrogen. The content of at least one of boron and nitrogen in the carbon fiber is 0.1% to 5% at an atomic weight ratio of the contained element to carbon. The diameter of the carbon fiber is 20 nm to 200 nm. Such an electron gun can have a high-brightness electron beam with a narrow energy width. The field emission electron gun is applied to various electron beam apparatus.
摘要:
A probe is made by attaching a carbon nanotube 12 to a mounting base end 13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film 14 formed by an electron microscope is stripped off at a stage before bonding by the coating film.