A chemical reactor includes two or more substrates joined along planar surfaces thereof, a chemical reaction chamber located between the two or more substrates, and a pair of electrodes on one of the substrates and along a wall of the reaction chamber. Each substrate is a substantially dielectric or semiconductor substrate. The chemical reaction chamber has a hollow interior, one or more input ports to transport a gas into the hollow interior, and an output port to transport a byproduct out of the hollow interior.