发明授权
- 专利标题： Integrated circuits comprising resistors having different sheet resistances and methods of fabricating the same
- 专利标题（中）： 包括具有不同薄片电阻的电阻器的集成电路及其制造方法
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申请号： US12173407申请日： 2008-07-15
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公开(公告)号： US07785979B2公开(公告)日： 2010-08-31
- 发明人: Roger Allen Booth, Jr. , Kangguo Cheng , Terence B. Hook
- 申请人： Roger Allen Booth, Jr. , Kangguo Cheng , Terence B. Hook
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Cantor Colburn LLP
- 代理商 Joseph Petrokaitis
- 主分类号： H01L21/324
- IPC分类号： H01L21/324 ; H01L21/8238
摘要：
The fabrication of integrated circuits comprising resistors having the same structure but different sheet resistances is disclosed herein. In one embodiment, a method of fabricating an integrated circuit comprises: concurrently forming a first resistor laterally spaced from a second resistor above or within a semiconductor substrate, the first and second resistors comprising a doped semiconductive material; depositing a dopant receiving material across the first and second resistors and the semiconductor substrate; removing the dopant receiving material from upon the first resistor while retaining the dopant receiving material upon the second resistor; and annealing the first and second resistors to cause a first sheet resistance of the first resistor to be different from a second sheet resistance of the second resistor.