Invention Grant
US07788630B2 Method and apparatus for determining an optical model that models the effect of optical proximity correction
有权
用于确定对光学邻近校正的影响进行建模的光学模型的方法和装置
- Patent Title: Method and apparatus for determining an optical model that models the effect of optical proximity correction
- Patent Title (中): 用于确定对光学邻近校正的影响进行建模的光学模型的方法和装置
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Application No.: US11726505Application Date: 2007-03-21
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Publication No.: US07788630B2Publication Date: 2010-08-31
- Inventor: Jianliang Li , Qilang Yan , Lawrence S. Melvin, III
- Applicant: Jianliang Li , Qilang Yan , Lawrence S. Melvin, III
- Applicant Address: US CA Mountain View
- Assignee: Synopsys, Inc.
- Current Assignee: Synopsys, Inc.
- Current Assignee Address: US CA Mountain View
- Agency: Park, Vaughan & Fleming LLP
- Agent Laxman Sahasrabuddhe
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06F9/45 ; G03F1/00

Abstract:
One embodiment provides a system that can enable a designer to determine the effects of subsequent processes at design time. During operation, the system may receive a test layout and an optical model that models an optical system, but which does not model the effects of subsequent processes, such as optical proximity correction (OPC). The system may generate a first dataset using the test layout and the optical model. Next, the system may apply OPC to the test layout, and generate a second dataset using the corrected test layout and the optical model. The system may then use the first dataset and the second dataset to adjust the optical model to obtain a second optical model that models the effects of subsequent processes.
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