发明授权
- 专利标题： Method and apparatus for specimen fabrication
- 专利标题（中）： 用于样品制造的方法和装置
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申请号： US12168241申请日： 2008-07-07
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公开(公告)号： US07791050B2公开(公告)日： 2010-09-07
- 发明人: Satoshi Tomimatsu , Kaoru Umemura , Yuichi Madokoro , Yoshimi Kawanami , Yasunori Doi
- 申请人： Satoshi Tomimatsu , Kaoru Umemura , Yuichi Madokoro , Yoshimi Kawanami , Yasunori Doi
- 申请人地址： JP Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Antonelli, Terry, Stout & Kraus, LLP.
- 主分类号： H01J37/20
- IPC分类号： H01J37/20
摘要：
A specimen fabrication apparatus, including: an ion beam irradiating optical system to irradiate a sample placed in a chamber, with an ion beam; a specimen holder to mount a specimen separated by the irradiation with the ion beam; a holder cassette to hold the specimen holder; a sample stage to hold the sample and the holder cassette; and a probe to move the specimen to the specimen holder, wherein the holder cassette is transferred to outside of the chamber in a condition of holding the specimen holder with the specimen mounted.
公开/授权文献
- US20090008578A1 METHOD AND APPARATUS FOR SPECIMEN FABRICATION 公开/授权日：2009-01-08
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