发明授权
- 专利标题: Metal silicide alloy local interconnect
- 专利标题(中): 金属硅化物合金局部互连
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申请号: US11693035申请日: 2007-03-29
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公开(公告)号: US07791109B2公开(公告)日: 2010-09-07
- 发明人: Clement H. Wann , Haining S. Yang
- 申请人: Clement H. Wann , Haining S. Yang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Ian D. MacKinnon, Esq.
- 主分类号: H01L27/10
- IPC分类号: H01L27/10 ; H01L27/11 ; G11C5/06 ; G11C11/00 ; G11C11/34
摘要:
A local interconnect is formed with a gate conductor line that has an exposed sidewall on an active area of a semiconductor substrate. The exposes sidewall comprises a silicon containing material that may form a silicide alloy upon silicidation. During a silicidation process, a gate conductor sidewall silicide alloy forms on the exposed sidewall of the gate conductor line and an active area silicide is formed on the active area. The two silicides are joined to provide an electrical connection between the active area and the gate conductor line. Multiple sidewalls may be exposed on the gate conductor line to make multiple connections to different active area silicides.
公开/授权文献
- US20080239792A1 METAL SILICIDE ALLOY LOCAL INTERCONNECT 公开/授权日:2008-10-02
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