发明授权
- 专利标题: Hybrid mounted device and method of manufacturing the same
- 专利标题(中): 混合安装装置及其制造方法
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申请号: US11641018申请日: 2006-12-19
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公开(公告)号: US07791212B2公开(公告)日: 2010-09-07
- 发明人: Morio Takahashi , Hiroyuki Yamazaki , Yukari Deki
- 申请人: Morio Takahashi , Hiroyuki Yamazaki , Yukari Deki
- 申请人地址: JP Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Young & Thompson
- 优先权: JP2005-366533 20051220
- 主分类号: H01L21/544
- IPC分类号: H01L21/544
摘要:
There is provided a hybrid mounted device that includes a element such as semiconductor laser diode (LD), and a board such as a silicon platform having formed thereon an optical waveguide. The LD is mounted to the silicon platform, and is optically coupled to the optical waveguide. The mounting position of the LD is determined by positioning first alignment marks formed on the board and second alignment marks formed on the LD. In this configuration, initial positional deviation amount measuring marks that can measure the initial positional deviation amount of the first alignment marks themselves are formed on the board. The mounting position of the is corrected to a position where the second alignment marks are shifted with respect to the first alignment marks according to the initial positional deviation amount measured from the initial positional deviation amount measuring marks.
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