公开(公告)号：US08285092B2

公开(公告)日：2012-10-09

申请号：US12531899

申请日：2008-03-07

申请人： Yukari Deki ,  Morio Takahashi

发明人： Yukari Deki ,  Morio Takahashi

IPC分类号： G02B6/26

CPC分类号： G02B6/1228 ,  G02B6/305

摘要： An optical waveguide includes a substrate in the shape of a flat plate; lower clad that is disposed on the substrate; and a core that is disposed on the lower clad and transmits light. The optical waveguide includes a first optical waveguide and a second optical waveguide. The first optical waveguide includes a first core on the lower clad, and is disposed so as to extend along a direction in which the light travels to a first position. The second optical waveguide includes a second core on the lower clad, is disposed so as to extend along a direction in which the light travels to a second position, and has a lower relative refractive index difference than the first optical waveguide. The first optical waveguide and the second optical waveguide form, between the first position and the second position, a layer structure where the first core and the second core are disposed such that the first core is positioned a predetermined distance away from the second core in a direction perpendicular to the substrate. At least either the first optical waveguide or the second optical waveguide includes a mode coupling section and a mode conversion section. The mode coupling section includes a directional coupler to conduct the mode coupling of the first core and the second core between the first position and the second position. The mode conversion section is connected to the mode coupling section, and has a tapered core structure to adjust the mode diameter of the first core to the mode diameter of the second core.

摘要翻译： 光波导包括平板形状的基板; 设置在基板上的下包层; 以及设置在下包层上并透射光的芯。 光波导包括第一光波导和第二光波导。 第一光波导包括在下包层上的第一芯，并且被布置成沿着光行进到第一位置的方向延伸。 第二光波导包括在下包层上的第二芯，被布置成沿着光行进到第二位置的方向延伸，并且具有比第一光波导更低的相对折射率差。 第一光波导和第二光波导在第一位置和第二位置之间形成层结构，其中第一芯和第二芯被布置成使得第一芯位于距第二芯的预定距离处 垂直于衬底的方向。 至少第一光波导或第二光波导包括模式耦合部分和模式转换部分。 模式耦合部分包括定向耦合器，以在第一位置和第二位置之间进行第一芯和第二芯的模式耦合。 模式转换部分连接到模式耦合部分，并且具有锥形芯结构，以将第一芯的模式直径调整到第二芯的模式直径。

公开(公告)号：US07791212B2

公开(公告)日：2010-09-07

申请号：US11641018

申请日：2006-12-19

申请人： Morio Takahashi ,  Hiroyuki Yamazaki ,  Yukari Deki

发明人： Morio Takahashi ,  Hiroyuki Yamazaki ,  Yukari Deki

IPC分类号： H01L21/544

CPC分类号： H01L23/544 ,  G02B6/4224 ,  H01L24/81 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2224/81121 ,  H01L2224/81801 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/12043 ,  H01L2924/00

摘要： There is provided a hybrid mounted device that includes a element such as semiconductor laser diode (LD), and a board such as a silicon platform having formed thereon an optical waveguide. The LD is mounted to the silicon platform, and is optically coupled to the optical waveguide. The mounting position of the LD is determined by positioning first alignment marks formed on the board and second alignment marks formed on the LD. In this configuration, initial positional deviation amount measuring marks that can measure the initial positional deviation amount of the first alignment marks themselves are formed on the board. The mounting position of the is corrected to a position where the second alignment marks are shifted with respect to the first alignment marks according to the initial positional deviation amount measured from the initial positional deviation amount measuring marks.

摘要翻译： 提供了一种混合安装装置，其包括诸如半导体激光二极管（LD）的元件，以及在其上形成有光波导的诸如硅平台的板。 LD安装到硅平台上，并且光耦合到光波导。 LD的安装位置通过定位在板上形成的第一对准标记和形成在LD上的第二对准标记来确定。 在该结构中，在基板上形成能够测量第一对准标记本身的初始位置偏移量的初始位置偏差量测量标记。 根据从初始位置偏差量测量标记测量的初始位置偏差量，将安装位置校正到相对于第一对准标记移位第二对准标记的位置。

公开(公告)号：US20100040327A1

公开(公告)日：2010-02-18

申请号：US12531899

申请日：2008-03-07

申请人： Yukari Deki ,  Morio Takahashi

发明人： Yukari Deki ,  Morio Takahashi

IPC分类号： G02B6/26 ,  G02B6/10

CPC分类号： G02B6/1228 ,  G02B6/305

摘要： An optical waveguide includes a substrate in the shape of a flat plate; lower clad that is disposed on the substrate; and a core that is disposed on the lower clad and transmits light. The optical waveguide includes a first optical waveguide and a second optical waveguide. The first optical waveguide includes a first core on the lower clad, and is disposed so as to extend along a direction in which the light travels to a first position. The second optical waveguide includes a second core on the lower clad, is disposed so as to extend along a direction in which the light travels to a second position, and has a lower relative refractive index difference than the first optical waveguide. The first optical waveguide and the second optical waveguide form, between the first position and the second position, a layer structure where the first core and the second core are disposed such that the first core is positioned a predetermined distance away from the second core in a direction perpendicular to the substrate. At least either the first optical waveguide or the second optical waveguide includes a mode coupling section and a mode conversion section. The mode coupling section includes a directional coupler to conduct the mode coupling of the first core and the second core between the first position and the second position. The mode conversion section is connected to the mode coupling section, and has a tapered core structure to adjust the mode diameter of the first core to the mode diameter of the second core.

摘要翻译： 光波导包括平板形状的基板; 设置在基板上的下包层; 以及设置在下包层上并透射光的芯。 光波导包括第一光波导和第二光波导。 第一光波导包括在下包层上的第一芯，并且被布置成沿着光行进到第一位置的方向延伸。 第二光波导包括在下包层上的第二芯，被布置成沿着光行进到第二位置的方向延伸，并且具有比第一光波导更低的相对折射率差。 第一光波导和第二光波导在第一位置和第二位置之间形成层结构，其中第一芯和第二芯被布置成使得第一芯位于距第二芯的预定距离处 垂直于衬底的方向。 至少第一光波导或第二光波导包括模式耦合部分和模式转换部分。 模式耦合部分包括定向耦合器，以在第一位置和第二位置之间进行第一芯和第二芯的模式耦合。 模式转换部分连接到模式耦合部分，并且具有锥形芯结构，以将第一芯的模式直径调整到第二芯的模式直径。

公开(公告)号：US20070170603A1

公开(公告)日：2007-07-26

申请号：US11641018

申请日：2006-12-19

申请人： Morio Takahashi ,  Hiroyuki Yamazaki ,  Yukari Deki

发明人： Morio Takahashi ,  Hiroyuki Yamazaki ,  Yukari Deki

IPC分类号： H01L23/544

CPC分类号： H01L23/544 ,  G02B6/4224 ,  H01L24/81 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2224/81121 ,  H01L2224/81801 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/12043 ,  H01L2924/00

摘要： There is provided a hybrid mounted device that includes a element such as semiconductor laser diode (LD), and a board such as a silicon platform having formed thereon an optical waveguide. The LD is mounted to the silicon platform, and is optically coupled to the optical waveguide. The mounting position of the LD is determined by positioning first alignment marks formed on the board and second alignment marks formed on the LD. In this configuration, initial positional deviation amount measuring marks that can measure the initial positional deviation amount of the first alignment marks themselves are formed on the board. The mounting position of the is corrected to a position where the second alignment marks are shifted with respect to the first alignment marks according to the initial positional deviation amount measured from the initial positional deviation amount measuring marks.

摘要翻译： 提供了一种混合安装装置，其包括诸如半导体激光二极管（LD）的元件，以及在其上形成有光波导的诸如硅平台的板。 LD安装到硅平台上，并且光耦合到光波导。 LD的安装位置通过定位在板上形成的第一对准标记和形成在LD上的第二对准标记来确定。 在该结构中，在基板上形成能够测量第一对准标记本身的初始位置偏移量的初始位置偏差量测量标记。 根据从初始位置偏差量测量标记测量的初始位置偏差量，将安装位置校正到相对于第一对准标记移位第二对准标记的位置。