发明授权
- 专利标题: Ionization vacuum gauge
- 专利标题(中): 电离真空计
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申请号: US11877590申请日: 2007-10-23
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公开(公告)号: US07791350B2公开(公告)日: 2010-09-07
- 发明人: Lin Xiao , Pi-Jin Chen , Zhao-Fu Hu , Yang Wei , Liang Liu , Shou-Shan Fan
- 申请人: Lin Xiao , Pi-Jin Chen , Zhao-Fu Hu , Yang Wei , Liang Liu , Shou-Shan Fan
- 申请人地址: CN Beijing TW Tu-Cheng, Taipei Hsien
- 专利权人: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人地址: CN Beijing TW Tu-Cheng, Taipei Hsien
- 代理商 Jeffrey T. Knapp
- 优先权: CN200710074323 20070509
- 主分类号: G01L21/30
- IPC分类号: G01L21/30 ; H01J49/10
摘要:
An ionization vacuum gauge includes a linear cathode, an anode, and an ion collector. The linear cathode, the anode, and the ion collector are concentrically aligned and arranged from center to outer, in that order. The linear cathode includes a linear base and a field emission film deposited coating on the linear base. The ionization vacuum gauge with low power consumption can be used in a high vacuum system and/or some special vacuum system that is sensitive to heat and light. Such a gauge can be used to determine, simply yet accurately, pressures at relatively high vacuum levels.
公开/授权文献
- US20080278173A1 IONIZATION VACUUM GAUGE 公开/授权日:2008-11-13
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