Invention Grant
- Patent Title: Micropump for integrated device for biological analyses
- Patent Title (中): 用于生物分析的集成器件的微型泵
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Application No.: US12019630Application Date: 2008-01-24
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Publication No.: US07794611B2Publication Date: 2010-09-14
- Inventor: Mario Scurati
- Applicant: Mario Scurati
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Baker & McKenzie LLP
- Priority: ITTO2002A0809 20020917
- Main IPC: C23F1/00
- IPC: C23F1/00
Abstract:
A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode (37) and second electrodes (38), accommodating between them portions of the diaphragm (35).
Public/Granted literature
- US20080138210A1 Micropump for Integrated Device for Biological Analyses Public/Granted day:2008-06-12
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