发明授权
- 专利标题: ESD high frequency diodes
- 专利标题(中): ESD高频二极管
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申请号: US11654735申请日: 2007-01-17
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公开(公告)号: US07795102B1公开(公告)日: 2010-09-14
- 发明人: Vladislav Vashchenko , Vladimir Kuznetsov , Peter J. Hopper
- 申请人: Vladislav Vashchenko , Vladimir Kuznetsov , Peter J. Hopper
- 申请人地址: US CA Santa Clara
- 专利权人: National Semiconductor Corporation
- 当前专利权人: National Semiconductor Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Vollrath & Associates
- 代理商 Jurgen K. Vollrath
- 主分类号: H01L21/331
- IPC分类号: H01L21/331
摘要:
In a SiGe BJT process, a diode is formed by defining a p-n junction between the BJT collector and BJT internal base, blocking the external gate regions of the BJT and doping the emitter poly of the BJT with the same dopant type as the internal base thereby using the emitter contact to define the contact to the internal base. Electrical contact to the collector is established through a sub-collector or by means of a second emitter poly and internal base both doped with the same dopant type as the collector.
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