发明授权
- 专利标题: Semiconductor device and method manufacturing semiconductor device
- 专利标题(中): 半导体器件和方法制造半导体器件
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申请号: US11700147申请日: 2007-01-31
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公开(公告)号: US07795682B2公开(公告)日: 2010-09-14
- 发明人: Akio Kaneko , Atsushi Yagishita , Satoshi Inaba
- 申请人: Akio Kaneko , Atsushi Yagishita , Satoshi Inaba
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2006-022310 20060131
- 主分类号: H01L29/786
- IPC分类号: H01L29/786
摘要:
The disclosure concerns a method of manufacturing a semiconductor device including forming a plurality of fins made of a semiconductor material on an insulating layer; forming a gate insulating film on side surfaces of the plurality of fins; and forming a gate electrode on the gate insulating film in such a manner that a compressive stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a direction perpendicular to the side surface and a tensile stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a direction perpendicular to the side surface.
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