发明授权
- 专利标题: Process for forming bumps and solder bump
- 专利标题(中): 用于形成凸块和焊料凸块的工艺
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申请号: US11661821申请日: 2005-08-30
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公开(公告)号: US07799607B2公开(公告)日: 2010-09-21
- 发明人: Seiji Karashima , Yoshihisa Yamashita , Satoru Tomekawa , Takashi Kitae , Seiichi Nakatani
- 申请人: Seiji Karashima , Yoshihisa Yamashita , Satoru Tomekawa , Takashi Kitae , Seiichi Nakatani
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2004-257206 20040903; JP2005-091336 20050328
- 国际申请: PCT/JP2005/015765 WO 20050830
- 国际公布: WO2006/025387 WO 20060309
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A process for forming bumps wherein a plurality of fine bumps are uniformly formed with high productivity. In this process, a resin (13) including solder powder and a convection additive (12) is supplied onto a substrate (10) having a plurality of electrodes (11) thereon. And subsequently the substrate (10) is heated to a temperature that enables the solder powder to melt while keeping a flat plate (14) in contact with a surface of the supplied resin (13). During this heating step, the molten solder powder is allowed to self-assemble onto the electrodes (11) so that a plurality of solder balls, resulting from the grown molten solder powder, are concurrently formed on the electrodes (11) in self-alignment manner. Finally, the flat plate (14) is moved away from the surface of the supplied resin (13), and then the resin (13) is removed to provide a substrate (10) having bumps (16) formed on the plurality of the electrodes.
公开/授权文献
- US20070257362A1 Process for Forming Bumps and Solder Bump 公开/授权日:2007-11-08
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