Invention Grant
- Patent Title: Electron-optical corrector for an aplanatic imaging system
- Patent Title (中): 用于平面成像系统的电子 - 光学校正器
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Application No.: US12091411Application Date: 2006-10-11
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Publication No.: US07800074B2Publication Date: 2010-09-21
- Inventor: Stephan Uhlemann
- Applicant: Stephan Uhlemann
- Agent Edwin D. Schindler
- Priority: DE102005050810 20051024
- International Application: PCT/DE2006/001773 WO 20061011
- International Announcement: WO2007/065388 WO 20070614
- Main IPC: H01J37/153
- IPC: H01J37/153

Abstract:
An electron-optical corrector for rendering superfluous both the third-order opening error and the anisotropic part of the extra-axial third-order coma, using round lenses and hexapole fields, the corrector includes at least three coaxially arranged hexapole fields with at least one round lens field is arranged between adjacent hexapole fields, so that the hexapole fields are imaged onto each other in pairs. The intensities of the hexapole fields are selected so that the image error coefficient of the three-fold astigmatism is equal to 0, and at least three hexapole fields in the Larmor reference system are rotated in relation to each other at an angle about the optical axis.
Public/Granted literature
- US20080265172A1 Electron-Optical Corrector for an Aplanatic Imaging System Public/Granted day:2008-10-30
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