发明授权
- 专利标题: Patterned-print thin-film transistors with top gate geometry
- 专利标题(中): 具有顶栅几何形状的图案印刷薄膜晶体管
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申请号: US12018794申请日: 2008-01-23
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公开(公告)号: US07804090B2公开(公告)日: 2010-09-28
- 发明人: William Wong , Rene Lujan , Eugene Chow
- 申请人: William Wong , Rene Lujan , Eugene Chow
- 申请人地址: US CA Palo Alto
- 专利权人: Palo Alto Research Center Incorporated
- 当前专利权人: Palo Alto Research Center Incorporated
- 当前专利权人地址: US CA Palo Alto
- 代理商 Jonathan A. Small
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
A self-aligned, thin-film, top-gate transistor and method of manufacturing same are disclosed. A first print-patterned mask is formed over a metal layer by digital lithography, for example by printing with a phase change material using a droplet ejector. The metal layer is then etched using the first print-patterned mask to form source and drain electrodes. A semiconductive layer and an insulative layer are formed thereover. A layer of photosensitive material is then deposited and exposed through the substrate, with the source and drain electrodes acting as masks for the exposure. Following development of the photosensitive material, a gate metal layer is deposited. A second print-patterned mask is then formed over the device, again by digital lithography. Etching and removal of the photosensitive material leaves the self-aligned top-gate electrode.
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