发明授权
- 专利标题: Semiconductor storage device and manufacturing method thereof
- 专利标题(中): 半导体存储装置及其制造方法
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申请号: US12022382申请日: 2008-01-30
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公开(公告)号: US07804133B2公开(公告)日: 2010-09-28
- 发明人: Takeshi Murata , Makoto Mizukami , Fumitaka Arai
- 申请人: Takeshi Murata , Makoto Mizukami , Fumitaka Arai
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2007-021170 20070131
- 主分类号: H01L27/115
- IPC分类号: H01L27/115
摘要:
Semiconductor storage devices in which a plurality of semiconductor element devices having different functions are disposed in the appropriate region of the partial SOI substrate and the interface between each gate insulator and each gate electrode is formed to be the same level, and manufacturing methods thereof are disclosed. According to one aspect, there is provided a semiconductor storage device includes a first semiconductor region provided in a semiconductor substrate including a buried insulator having opening portions, a second semiconductor region without including buried insulator, a plurality of first semiconductor element devices disposed above the buried insulator, a plurality of second semiconductor element devices each disposed in a region including a region above the opening portion of the buried insulator, and a plurality of third semiconductor element devices disposed in the second semiconductor region.
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