发明授权
- 专利标题: Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product
- 专利标题(中): 控制系统,光刻投影装置,控制支撑结构的方法以及计算机程序产品
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申请号: US11812817申请日: 2007-06-21
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公开(公告)号: US07804579B2公开(公告)日: 2010-09-28
- 发明人: Erik Roelof Loopstra , Engelbertus Antonlus Fransiscus Van Der Pasch , Marc Wilhelmus Maria Van Der Wijst
- 申请人: Erik Roelof Loopstra , Engelbertus Antonlus Fransiscus Van Der Pasch , Marc Wilhelmus Maria Van Der Wijst
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; G03B27/58 ; G03B27/32 ; G01B11/00 ; G01B11/14
摘要:
A control system is provided for controlling a support structure in a lithographic apparatus. The control system includes a first measurement system arranged to measure the position of a substrate supported by the support structure, the position being measured in a first coordinate system. The control system further includes a second measurement system for measuring the position of the support structure in a second coordinate system, the first measurement system having a presumed position in the second coordinate system. The control system further comprises a controller configured to control the position of the support structure based on measurements by the second measurement system, to convert the measured position of the substrate into a converted position of the support structure in the second coordinate system, to position the support structure based on the converted position, to receive a position error signal indicative of a difference between the presumed position and an actual position of the first measurement system in the second coordinate system, and to position the support structure in a manner dependent upon the position error signal.
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