发明授权
- 专利标题: Displacement measuring apparatus
- 专利标题(中): 位移测量仪
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申请号: US12177977申请日: 2008-07-23
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公开(公告)号: US07808650B2公开(公告)日: 2010-10-05
- 发明人: Masahito Kon , Kayoko Taniguchi , Hideaki Tamiya , Yasuhiko Onodera , Hideki Tsuchiya , Akihiro Kuroda
- 申请人: Masahito Kon , Kayoko Taniguchi , Hideaki Tamiya , Yasuhiko Onodera , Hideki Tsuchiya , Akihiro Kuroda
- 申请人地址: JP Nara
- 专利权人: Mori Seiki Co., Ltd.
- 当前专利权人: Mori Seiki Co., Ltd.
- 当前专利权人地址: JP Nara
- 代理机构: Sonnenschein Nath & Rosenthal LLP
- 优先权: JP2007-201283 20070801
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
Disclosed is a displacement measuring apparatus that includes a composite scale having a magnetic pattern and a diffraction grating each aligned in a direction of measuring axis, and a detector head moving in a direction of measuring axis relative to the composite scale. The detector head has a magnetic detection unit detecting a magnetic field exerted by the magnetic pattern to generate first reproduced signals, a light source irradiating the diffraction grating with light, and an optical detection unit detecting the light diffracted by the diffraction grating to generate second reproduced signals. In composite scale, the magnetic pattern and the diffraction grating are arranged such that a pitch of the first reproduced signals is larger than that of the second reproduced signals.
公开/授权文献
- US20090033946A1 DISPLACEMENT MEASURING APPARATUS 公开/授权日:2009-02-05