发明授权
- 专利标题: Device and method for scanning probe microscopy
- 专利标题(中): 用于扫描探针显微镜的装置和方法
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申请号: US11576724申请日: 2005-09-30
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公开(公告)号: US07810166B2公开(公告)日: 2010-10-05
- 发明人: Jens Struckmeier , Karl Schlagenhauf
- 申请人: Jens Struckmeier , Karl Schlagenhauf
- 申请人地址: DE
- 专利权人: Nambition GmbH
- 当前专利权人: Nambition GmbH
- 当前专利权人地址: DE
- 代理机构: Hooker & Habib, P.C.
- 优先权: DE102004048971 20041007
- 国际申请: PCT/EP2005/010604 WO 20050930
- 国际公布: WO2006/040025 WO 20060420
- 主分类号: G01Q60/00
- IPC分类号: G01Q60/00 ; G01Q60/24 ; G01Q10/00 ; G01Q20/00
摘要:
The invention relates to a device for scanning probe microscopy, said device comprising a scanning microscopy measuring device provided with a measuring probe for scanning microscopy measurements and a sample carrier for receiving a sample to be measured by scanning microscopy; a control device which is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically control the measuring device in order to perform a scanning microscopy measurement according to pre-defined control parameters; and/or an evaluation device that is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically evaluate measurements according to pre-defined evaluation parameters.
公开/授权文献
- US20080072665A1 Device and Method for Scanning Probe Microscopy 公开/授权日:2008-03-27
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