发明授权
US07811149B2 Method for fabricating carbon nanotube-based field emission device
有权
制造基于碳纳米管的场致发射器件的方法
- 专利标题: Method for fabricating carbon nanotube-based field emission device
- 专利标题(中): 制造基于碳纳米管的场致发射器件的方法
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申请号: US11490810申请日: 2006-07-21
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公开(公告)号: US07811149B2公开(公告)日: 2010-10-12
- 发明人: Peng Liu , Kai-Li Jiang , Kai Liu , Shou-Shan Fan
- 申请人: Peng Liu , Kai-Li Jiang , Kai Liu , Shou-Shan Fan
- 申请人地址: CN Beijing TW Tu-Cheng, Taipei Hsien
- 专利权人: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人地址: CN Beijing TW Tu-Cheng, Taipei Hsien
- 代理商 Jeffrey T. Knapp
- 优先权: CN200510101025 20051104
- 主分类号: H01J19/24
- IPC分类号: H01J19/24
摘要:
An exemplary method for fabricating a carbon nanotube-based field emission device is provided. A substrate is provided. A catalyst layer is formed on the substrate. A carbon nanotube array is grown from the catalyst layer. The carbon nanotube array includes a root portion and an opposite top portion respectively being in contact with and away from the catalyst layer. A cathode base with an adhesive layer formed thereon is provided. The top portion of the carbon nanotube array is immersed into the adhesive layer. The adhesive layer is solidified to embed the immersed top portion into the solidified adhesive layer. The root portion of the carbon nanotube array is exposed.
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