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公开(公告)号:US11651924B1
公开(公告)日:2023-05-16
申请号:US17846498
申请日:2022-06-22
Applicant: FEI Company
Inventor: Kun Liu , Chad Rue , Alan Stephen Bahm
IPC: H01J37/073 , H01J1/304 , H01J1/34 , H01J19/24
CPC classification number: H01J1/3044 , H01J1/34 , H01J19/24 , H01J37/073 , H01J2201/30415 , H01J2201/30449 , H01J2237/06341
Abstract: Methods of producing microrods for electron emitters and associated microrods and electron emitters. In one example, a method of producing a microrod for an electron emitter comprises providing a bulk crystal ingot, removing a first plate from the bulk crystal ingot, reducing a thickness of the first plate to produce a second plate, and milling the second plate to produce one or more microrods. In another example, a microrod for an electron emitter comprises a microrod tip region that comprises a nanoneedle that in turn comprises a nanorod and a nanoprotrusion tip. The microrod and the nanoneedle are integrally formed from a bulk crystal ingot by sequentially: (i) removing the microrod from the bulk crystal ingot; (ii) coarse processing the microrod tip region to produce the nanorod; and (iii) fine processing the nanorod to produce the nanoprotrusion tip.
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公开(公告)号:US10692713B2
公开(公告)日:2020-06-23
申请号:US16346615
申请日:2017-11-28
Applicant: LIGHTLAB SWEDEN AB
Inventor: Jonas Tirén
Abstract: The present invention generally relates to a field emission light source and specifically to a field emission light source adapted to emit ultraviolet (UV) light. The light source has a UV emission member provided with an electron-excitable UV emitting material. The material is at least one of LuPO3:Pr3+, Lu2Si2O2:Pr3+, LaPO4:Pr3+, YBO3:Pr3+ and YPO4:Bi3+.
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公开(公告)号:US10600606B2
公开(公告)日:2020-03-24
申请号:US16391629
申请日:2019-04-23
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Injo Ok , Choonghyun Lee , Soon-Cheon Seo , Seyoung Kim
IPC: H01L21/00 , H01J21/10 , H01J9/18 , H01J19/24 , H01L29/788 , H01L27/11556 , H01L29/66 , H01L21/02 , H01L29/78 , H01L29/786
Abstract: A method is presented for controlling an electric field from a gate structure. The method includes forming a hardmask over a fin stack including a plurality of layers, forming a first dielectric layer over the hardmask, forming a sacrificial layer over the first dielectric layer, etching the sacrificial layer to expose a top surface of the first dielectric layer, depositing a second dielectric layer in direct contact with exposed surfaces of the first dielectric layer and the sacrificial layer, removing a layer of the plurality of layers of the fin stack to define an air gap within the fin stack, and forming triangle-shaped epitaxial growths within the air gap defined within the fin stack.
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公开(公告)号:US10580609B2
公开(公告)日:2020-03-03
申请号:US16430249
申请日:2019-06-03
Inventor: Jin-Woo Jeong , Yoon-Ho Song
Abstract: Provided is an electron emission source including a substrate, a fixed structure provided on the substrate, and an electron emission yarn provided between the substrate and the fixed structure. The fixed structure includes a first portion having a first width and a second portion having a second width greater than the first width, and the electron emission yarn extends on a first sidewall of the first portion of the fixed structure from between the fixed structure and the substrate.
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公开(公告)号:US10424456B2
公开(公告)日:2019-09-24
申请号:US15833394
申请日:2017-12-06
Applicant: International Business Machines Corporation
Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Michael Rizzolo
Abstract: A field emission transistor includes a gate, a fold over emitter, and fold over collector. The emitter and the collector are separated from the gate by a void and are separated from a gate contact by gate contact dielectric. The void may be a vacuum, ambient air, or a gas. Respective ends of the emitter and the collector are separated by a gap. Electrons are drawn across gap from the emitter to the collector by an electrostatic field created when a voltage is applied to the gate. The emitter and collector include a first conductive portion substantially parallel with gate and a second conductive portion substantially perpendicular with gate. The second conductive portion may be formed by bending a segment of the first conductive portion. The second conductive portion is folded inward from the first conductive portion towards the gate. Respective second conductive portions are generally aligned.
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公开(公告)号:US20190287786A1
公开(公告)日:2019-09-19
申请号:US16346615
申请日:2017-11-28
Applicant: LIGHTLAB SWEDEN AB
Inventor: Jonas TIRÉN
Abstract: The present invention generally relates to a field emission light source and specifically to a field emission light source adapted to emit ultraviolet (UV) light. The light source has a UV emission member provided with an electron-excitable UV emitting material. The material is at least one of LuPO3:Pr3+, Lu2Si2O2:Pr3+, LaPO4:Pr3+, YBO3:Pr3+ and YPO4:Bi3+.
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公开(公告)号:US20190252146A1
公开(公告)日:2019-08-15
申请号:US16342475
申请日:2017-10-17
Applicant: WiSys Technology Foundation, Inc.
Inventor: Charles D. Nelson , Harold T Evensen
CPC classification number: H01J21/105 , H01J1/304 , H01J9/025 , H01J9/18 , H01J19/24 , H01J19/38 , H01J19/82 , H01L51/0017 , H01L51/0045 , H01L51/0048 , H01L51/055 , H01L51/0558 , H01L51/105
Abstract: A field emission transistor uses carbon nanotubes positioned to extend along a substrate plane rather than perpendicularly thereto. The carbon nanotubes may be pre-manufactured and applied to the substrate and then may be etched to create a gap between the carbon nanotubes and an anode through which electrons may flow by field emission. A planar gate may be positioned beneath the gap to provide a triode structure.
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公开(公告)号:US10043649B2
公开(公告)日:2018-08-07
申请号:US14773582
申请日:2014-03-14
Applicant: LightLab Sweden AB
Inventor: Jonas Tirén
Abstract: The present invention relates to a field emission lighting arrangement, comprising an anode and a cathode, where the shape of the cathode is selected based on the shape of a evacuated envelope in which the anode and cathode is provided. The inventive shape of cathode allows for an improved uniformity of an electric field provided between the anode and cathode during operation of the field emission lighting arrangement. The invention also relates to a corresponding method for selecting a shape of such a cathode.
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公开(公告)号:US20170250048A1
公开(公告)日:2017-08-31
申请号:US15442408
申请日:2017-02-24
Applicant: California Institute of Technology
Inventor: Axel SCHERER , William M. JONES , Danil M. LUKIN , Sameer WALAVALKAR , Chieh-feng CHANG
CPC classification number: H01J19/24 , H01J9/025 , H01J21/02 , H01J21/105 , H01J2209/0223
Abstract: Nanoscale field-emission devices are presented, wherein the devices include at least a pair of electrodes separated by a gap through which field emission of electrons from one electrode to the other occurs. The gap is dimensioned such that only a low voltage is required to induce field emission. As a result, the emitted electrons energy that is below the ionization potential of the gas or gasses that reside within the gap. In some embodiments, the gap is small enough that the distance between the electrodes is shorter than the mean-free path of electrons in air at atmospheric pressure. As a result, the field-emission devices do not require a vacuum environment for operation.
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公开(公告)号:US09508522B2
公开(公告)日:2016-11-29
申请号:US14207216
申请日:2014-03-12
Applicant: Samsung Electronics Co., Ltd. , SRI INTERNATIONAL
Inventor: Shang-hyeun Park , Paul R. Schwoebel , Il-hwan Kim , Do-yoon Kim , Yong-chul Kim , Chang-soo Lee , Tae-won Jeong
IPC: H01J35/06 , H01J35/04 , H01J19/44 , H01J3/02 , H01J3/38 , H01J1/30 , H01J1/90 , A61B6/00 , H01J1/304 , H01J19/24 , H01J19/42 , B82Y30/00
CPC classification number: H01J35/065 , A61B6/40 , A61B6/4064 , A61B6/4488 , B82Y30/00 , H01J1/304 , H01J1/90 , H01J3/021 , H01J3/38 , H01J19/24 , H01J19/42 , H01J19/44 , H01J35/045 , H01J35/06 , H01J2201/304 , H01J2201/30469 , H01J2201/3195 , H01J2203/0204 , H01J2203/0208 , H01J2203/0212 , H01J2203/0216 , H01J2203/0236 , H01J2235/06 , H01J2235/1212 , H01J2235/1291 , H01J2235/1295 , Y10S977/742 , Y10S977/939 , Y10S977/95
Abstract: An x-ray generator includes a housing, a cathode block that is arranged in the housing and emits electrons via a field emission scheme, an anode block that is arranged in the housing and generates x-rays in response to the electrons emitted from the cathode block and collide with the anode block, and a heat sink block that contacts the cathode block and dissipates heat generated therein to an outside of the housing.
Abstract translation: X射线发生器包括壳体,阴极块,其布置在壳体中并经由场致发射方案发射电子;阳极块,布置在壳体中并响应于从阴极发射的电子产生X射线 阻挡并与阳极块碰撞,以及散热块,其接触阴极块并将其中产生的热量散发到壳体的外部。
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