发明授权
- 专利标题: Compound, polymer, and radiation-sensitive composition
- 专利标题(中): 化合物,聚合物和辐射敏感组合物
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申请号: US11914024申请日: 2006-05-11
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公开(公告)号: US07812105B2公开(公告)日: 2010-10-12
- 发明人: Tomoki Nagai , Eiji Yoneda , Takuma Ebata , Takanori Kawakami , Makoto Sugiura , Tsutomu Shimokawa , Makoto Shimizu
- 申请人: Tomoki Nagai , Eiji Yoneda , Takuma Ebata , Takanori Kawakami , Makoto Sugiura , Tsutomu Shimokawa , Makoto Shimizu
- 申请人地址: JP Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Ditthavong Mori & Steiner, P.C.
- 优先权: JP2005-138351 20050511; JP2005-150156 20050523; JP2006-027388 20060203
- 国际申请: PCT/JP2006/309446 WO 20060511
- 国际公布: WO2006/121096 WO 20061116
- 主分类号: C08F14/18
- IPC分类号: C08F14/18 ; C08F28/02
摘要:
A radiation-sensitive resin composition is provided which has high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, and pattern shape, and, in particular, a high resolution radiation-sensitive resin composition providing a wide DOF and excelling in LER. Also provided are a polymer which can be used in the composition and a novel compound useful for synthesizing the polymer. The novel compound is shown by the following formula (2), wherein R4 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, at least one of the Rfs represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, Mm+ represents a metal ion or an onium cation, m represents an integer of 1 to 3, and p is an integer of 1 to 8.
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