发明授权
- 专利标题: System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus
- 专利标题(中): 系统管理极紫外(EUV)光刻设备的腔室之间的气流
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申请号: US12002073申请日: 2007-12-14
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公开(公告)号: US07812329B2公开(公告)日: 2010-10-12
- 发明人: Alexander N. Bykanov , David C. Brandt , Igor V. Fomenkov , William N. Partlo
- 申请人: Alexander N. Bykanov , David C. Brandt , Igor V. Fomenkov , William N. Partlo
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 代理商 Matthew K. Hillman
- 主分类号: G21K5/00
- IPC分类号: G21K5/00
摘要:
A gas flow management system may comprise a first and second enclosing walls at least partially surrounding first and second respective spaces; a system generating plasma in the first space, the plasma emitting extreme ultraviolet light; an elongated body restricting flow from the first space to the second space, the body at least partially surrounding a passageway and having a first open end allowing EUV light to enter the passageway from the first space and a second open end allowing EUV light to exit the passageway into the second space, the body shaped to establish a location having a reduced cross-sectional area relative to the first and second ends; and a flow of gas exiting an aperture, the aperture positioned to introduce gas into the passageway at a position between the first end of the body and the location having a reduced cross-sectional area.
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