发明授权
- 专利标题: Piezoelectric/electrostrictive membrane type measuring device
- 专利标题(中): 压电/电致伸缩膜式测量装置
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申请号: US12331694申请日: 2008-12-10
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公开(公告)号: US07812506B2公开(公告)日: 2010-10-12
- 发明人: Hideki Shimizu , Takao Ohnishi , Tomohiro Yamada
- 申请人: Hideki Shimizu , Takao Ohnishi , Tomohiro Yamada
- 申请人地址: JP Nagoya
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya
- 代理机构: Burr & Brown
- 优先权: JP2006-184061 20060704; JP2006-221129 20060814; JP2007-065922 20070314
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
A piezoelectric/electrostrictive membrane type sensor is provided with a ceramic base body and a piezoelectric/electrostrictive element. The ceramic base body includes a thin diaphragm portion, a thick portion and a cavity formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body and also includes a piezoelectric/electrostrictive body, and an upper electrode and a lower electrode sandwiching the piezoelectric/electrostrictive body. Further, the piezoelectric/electrostrictive body contains an alkaline metal or an alkaline earth metal, with the upper electrode and the lower electrode containing gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents the continuation of a low-quality measurement.
公开/授权文献
- US20090095072A1 PIEZOELECTRIC/ELECTROSTRICTIVE MEMBRANE TYPE SENSOR 公开/授权日:2009-04-16