发明授权
- 专利标题: Surface texture measuring instrument
- 专利标题(中): 表面纹理测量仪
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申请号: US11806614申请日: 2007-06-01
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公开(公告)号: US07814779B2公开(公告)日: 2010-10-19
- 发明人: Shiro Igasaki , Masaoki Yamagata
- 申请人: Shiro Igasaki , Masaoki Yamagata
- 申请人地址: JP Kawasaki-shi
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2006-157870 20060606
- 主分类号: G01B5/28
- IPC分类号: G01B5/28
摘要:
A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12). The surface texture measuring instrument further includes: a scanning controller (54) that collects a detection signal from the force sensor (1) and drives the actuator such that the detecting signal coincides with a target measurement value; a touch signal generator (51) that generates a touch signal when the detection signal from the force sensor (1) coincides with the target measurement value; and a measurement value collecting unit (55) that collects a measurement value from a counter (26) at a predetermined time interval in a state where a fluctuation range of the detection signal from the force sensor (1) is within a preset range when a scanning controller is in operation, the latch counter (52) collecting a measurement value from a latch counter (52) each time the touch signal is generated in a state where the detection signal from the force sensor (1) oscillates and an amplitude exceeds the preset range.
公开/授权文献
- US20070295100A1 Surface texture measuring instrument 公开/授权日:2007-12-27
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