发明授权
US07815289B2 Micro-fluid ejection heads and methods for bonding substrates to supports 有权
微流体喷射头和将基底粘合到支撑体上的方法

Micro-fluid ejection heads and methods for bonding substrates to supports
摘要:
A substantially planar micro-fluid ejection device, where the micro-fluid ejection head is hermetically sealed and bonded to a support material, and a method of bonding a silicon device, such as a micro-fluid ejection head, to a support material.
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