发明授权
- 专利标题： Electrolyte retaining on a rotating platen by directional air flow
- 专利标题（中）： 电解液通过定向气流保持在转盘上
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申请号： US12246834申请日： 2008-10-07
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公开(公告)号： US07815787B2公开(公告)日： 2010-10-19
- 发明人: Hung Chih Chen , Rashid A. Mavliev
- 申请人： Hung Chih Chen , Rashid A. Mavliev
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： B24B1/00
- IPC分类号： B24B1/00 ; B23H5/08
摘要：
A method and apparatus for retaining electrolyte on a rotating platen using directional air flow is provided. In one embodiment, an apparatus for processing a substrate is provided. The apparatus includes a platen assembly having a surface for supporting a processing pad and disposed on a stationary base so that the platen assembly may rotate relative to the base; and an air knife coupled to the base and extended over a portion of the surface, the air knife operable to deliver a stream of air toward the pad to divert at least a portion of a fluid disposed on the pad toward a center of the pad.
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