A temperature controller for controlling temperature of a first structure having a first flat face comprises a second structure having a second flat face for planar contact with the first flat face, a pressure-applying means for pressing the first structure, a second supporting means for supporting the second structure to be capable of changing inclination of the second flat face, a first supporting means for supporting the first structure by contact with a portion of the first structure other than the first flat face, and a temperature-controlling means, wherein the first structure is supported by pressing the first structure by the pressure-applying means, and the second structure is brought into contact with the temperature-controlling means with interposition of the second supporting means.