发明授权
- 专利标题: Technique for manufacturing a solar cell
- 专利标题(中): 太阳能电池制造技术
-
申请号: US12581491申请日: 2009-10-19
-
公开(公告)号: US07816239B2公开(公告)日: 2010-10-19
- 发明人: Julian G. Blake , Kevin M. Daniels
- 申请人: Julian G. Blake , Kevin M. Daniels
- 申请人地址: US MA Gloucester
- 专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址: US MA Gloucester
- 主分类号: H01L21/04
- IPC分类号: H01L21/04
摘要:
Techniques for manufacturing solar cells are disclosed. In one particular exemplary embodiment, the technique may comprise disposing a mask upstream of the solar cell, the mask comprising a plurality of filaments spaced apart from one another to define at least one aperture; directing a ribbon ion beam of desired species toward the solar cell to ion implant a portion of the solar cell defined by the at least one aperture of the mask; and orienting the ribbon ion beam such that longer cross-section dimension of the ribbon beam is perpendicular to the aperture in one plane.
公开/授权文献
- US20100124799A1 TECHNIQUE FOR MANUFACTURING A SOLAR CELL 公开/授权日:2010-05-20