发明授权
- 专利标题: Solder connector structure and method
- 专利标题(中): 焊接接头结构及方法
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申请号: US12138482申请日: 2008-06-13
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公开(公告)号: US07816248B2公开(公告)日: 2010-10-19
- 发明人: Mukta G. Farooq , Lacrtis Economikos , Ian D. Melville , Kevin S. Petrarca , Richard P. Volant
- 申请人: Mukta G. Farooq , Lacrtis Economikos , Ian D. Melville , Kevin S. Petrarca , Richard P. Volant
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Gibb I.P. Law Firm, LLC
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
Disclosed are embodiments of a far back end of the line solder connector and a method of forming the connector that eliminates the use aluminum, protects the integrity of the ball limiting metallurgy (BLM) layers and promotes adhesion of the BLM layers by incorporating a thin conformal conductive liner into the solder connector structure. This conductive liner coats the top of the via filling in any divots in order to create a uniform surface for BLM deposition and to, thereby, protect the integrity of the BLM layers. The liner further coats the dielectric sidewalls of the well in which the BLM layers are formed in order to enhance adhesion of the BLM layers to the well.
公开/授权文献
- US20080248643A1 SOLDER CONNECTOR STRUCTURE AND METHOD 公开/授权日:2008-10-09
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