发明授权
- 专利标题: Semiconductor memory device
- 专利标题(中): 半导体存储器件
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申请号: US12020210申请日: 2008-01-25
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公开(公告)号: US07816717B2公开(公告)日: 2010-10-19
- 发明人: Tohru Ozaki
- 申请人: Tohru Ozaki
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2007-014862 20070125
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L29/76 ; H01L29/94
摘要:
A semiconductor memory device, comprising: a semiconductor substrate; a memory cell section comprising a memory transistor provided on the semiconductor substrate, the memory transistor including a first gate electrode provided on the semiconductor substrate with a gate insulating film interposed therebetween, and a source and drain provided at both sides of the first gate electrode on the semiconductor substrate, and a ferroelectric capacitor provided above the memory transistor, the ferroelectric capacitor including a first electrode film connected to any one of a source and drain of the memory transistor, a second electrode film connected to the other one of the drain and source of the memory transistor, and a ferroelectric film provided between the first electrode film and the second electrode film, the memory cell section having the memory transistor and the ferroelectric capacitor connected in parallel to each other; and a select transistor section, comprising a select transistor provided at an end of the memory cell section, the select transistor including a second gate electrode provided on the semiconductor substrate with the gate insulating film interposed therebetween, and a source and drain provided at both sides of the second gate electrode on the semiconductor substrate, and a third electrode film connected to the source and drain of the select transistor and connected to a bit line via a bit line contact.
公开/授权文献
- US20080179646A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2008-07-31
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