发明授权
- 专利标题： Film bulk acoustic resonator and filter
- 专利标题（中）： 薄膜体声波谐振器和滤波器
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申请号： US12000654申请日： 2007-12-14
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公开(公告)号： US07816998B2公开(公告)日： 2010-10-19
- 发明人: Motoaki Hara , Tokihiro Nishihara , Masanori Ueda , Go Endo
- 申请人： Motoaki Hara , Tokihiro Nishihara , Masanori Ueda , Go Endo
- 申请人地址： JP Yokohama JP Tokyo
- 专利权人： Fujitsu Media Devices Limited,Taiyo Yuden Co., Ltd.
- 当前专利权人： Fujitsu Media Devices Limited,Taiyo Yuden Co., Ltd.
- 当前专利权人地址： JP Yokohama JP Tokyo
- 代理机构： Arent Fox LLP
- 优先权： JP2006-337711 20061215
- 主分类号： H03H9/54
- IPC分类号： H03H9/54 ; H03H9/15
摘要：
A film bulk acoustic resonator includes a lower electrode that is formed on a void of a substrate or is formed so that a void is formed between the lower electrode and the substrate, a piezoelectric film that is formed on the lower electrode, an upper electrode that is formed on the piezoelectric film so as to have a resonance region facing the lower electrode through the piezoelectric film, a support region that is provided around the resonance region, has a width of 0.35 times to 0.65 times a wavelength of a wave propagating in a lateral direction, and transmits the wave passes, and an adjacent region that is provided around the support region and blocks the wave.
公开/授权文献
- US20080150653A1 Film bulk acoustic resonator and filter 公开/授权日：2008-06-26