发明授权
- 专利标题: Dielectric-layer-coated substrate and installation for production thereof
- 专利标题(中): 电介质层被覆基板和其制造的安装
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申请号: US10562451申请日: 2004-06-28
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公开(公告)号: US07820017B2公开(公告)日: 2010-10-26
- 发明人: Carole Baubet , Klaus Fischer , Marcus Loergen , Jean Christophe Giron , Nicolas Nadaud , Eric Mattman , Jean Paul Rousseau , Alfred Hofrichter , Manfred Jansen
- 申请人: Carole Baubet , Klaus Fischer , Marcus Loergen , Jean Christophe Giron , Nicolas Nadaud , Eric Mattman , Jean Paul Rousseau , Alfred Hofrichter , Manfred Jansen
- 申请人地址: FR Courbevoie
- 专利权人: Saint-Gobain Glass France
- 当前专利权人: Saint-Gobain Glass France
- 当前专利权人地址: FR Courbevoie
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: FR0307847 20030627
- 国际申请: PCT/FR2004/001652 WO 20040628
- 国际公布: WO2005/000759 WO 20050106
- 主分类号: C23C14/34
- IPC分类号: C23C14/34
摘要:
The invention relates to a substrate (1), especially a glass substrate, coated with at least one dielectric thin-film layer deposited by sputtering, especially magnetically enhanced sputtering and preferably reactive sputtering in the presence of oxygen and/or nitrogen, with exposure to at least one ion beam (3) coming from an ion source (4), characterized in that said dielectric layer exposed to the ion beam has a refractive index that can be adjusted according to the parameters of the ion source, said ion source being a linear source.
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