发明授权
US07820017B2 Dielectric-layer-coated substrate and installation for production thereof 有权
电介质层被覆基板和其制造的安装

Dielectric-layer-coated substrate and installation for production thereof
摘要:
The invention relates to a substrate (1), especially a glass substrate, coated with at least one dielectric thin-film layer deposited by sputtering, especially magnetically enhanced sputtering and preferably reactive sputtering in the presence of oxygen and/or nitrogen, with exposure to at least one ion beam (3) coming from an ion source (4), characterized in that said dielectric layer exposed to the ion beam has a refractive index that can be adjusted according to the parameters of the ion source, said ion source being a linear source.
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