Invention Grant
US07820460B2 Patterned assembly for manufacturing a solar cell and a method thereof
有权
用于制造太阳能电池的图案化组件及其方法
- Patent Title: Patterned assembly for manufacturing a solar cell and a method thereof
- Patent Title (中): 用于制造太阳能电池的图案化组件及其方法
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Application No.: US12205514Application Date: 2008-09-05
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Publication No.: US07820460B2Publication Date: 2010-10-26
- Inventor: Paul Sullivan , Peter Nunan , Steven R. Walther
- Applicant: Paul Sullivan , Peter Nunan , Steven R. Walther
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/00 ; C23C16/00
Abstract:
Apparatuses and methods for manufacturing a solar cell are disclosed. In a particular embodiment, the solar cell may be manufactured by disposing a solar cell in a chamber having a particle source; disposing a patterned assembly comprising an aperture and an assembly segment between the particle source and the solar cell; and selectively implanting first type dopants traveling through the aperture into a first region of the solar cell while minimizing introduction of the first type dopants into a region outside of the first region.
Public/Granted literature
- US20090227062A1 PATTERNED ASSEMBLY FOR MANUFACTURING A SOLAR CELL AND A METHOD THEREOF Public/Granted day:2009-09-10
Information query
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