发明授权
- 专利标题: Decoder for a stationary switch machine
- 专利标题(中): 固定式开关机的解码器
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申请号: US11548428申请日: 2006-10-11
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公开(公告)号: US07820501B2公开(公告)日: 2010-10-26
- 发明人: Yun-Yu Wang , Christopher D. Sheraw , Anthony G. Domenicucci , Linda Black , Judson R. Holt , David M. Fried
- 申请人: Yun-Yu Wang , Christopher D. Sheraw , Anthony G. Domenicucci , Linda Black , Judson R. Holt , David M. Fried
- 申请人地址: US NY Armonk KY Grand Cayman
- 专利权人: International Business Machines Corporation,GlobalFoundries, Inc
- 当前专利权人: International Business Machines Corporation,GlobalFoundries, Inc
- 当前专利权人地址: US NY Armonk KY Grand Cayman
- 代理商 Ian D. MacKinnon
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Accordingly, in one embodiment of the invention, a method is provided for reducing stacking faults in an epitaxial semiconductor layer. In accordance with such method, a substrate is provided which includes a first single-crystal semiconductor region including a first semiconductor material, the first semiconductor region having a crystal orientation. An epitaxial layer including the first semiconductor material is grown on the first semiconductor region, the epitaxial layer having the crystal orientation. The substrate is then annealed with the epitaxial layer at a temperature greater than 1100 degrees Celsius in an ambient including hydrogen, whereby the step of annealing reduces stacking faults in the epitaxial layer.
公开/授权文献
- US20080087961A1 METHOD OF REDUCING STACKING FAULTS THROUGH ANNEALING 公开/授权日:2008-04-17