发明授权
- 专利标题: Vertical indent production repair
- 专利标题(中): 垂直缩进生产维修
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申请号: US11898837申请日: 2007-09-17
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公开(公告)号: US07829360B2公开(公告)日: 2010-11-09
- 发明人: Bernabe J. Arruza , Ronald Bozak , Kenneth Gilbert Roessler , Andrew Dinsdale , Tod Evan Robinson , David Brinkley
- 申请人: Bernabe J. Arruza , Ronald Bozak , Kenneth Gilbert Roessler , Andrew Dinsdale , Tod Evan Robinson , David Brinkley
- 申请人地址: US FL Delray Beach
- 专利权人: Rave, LLC
- 当前专利权人: Rave, LLC
- 当前专利权人地址: US FL Delray Beach
- 代理商 Anthony R. Carlis
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method of nanomachining is provided. The method includes plunging a nanometer-scaled tip into a surface of a substrate at a first location in a first direction that is substantially perpendicular to the surface, thereby displacing a first portion of the substrate with the tip. The method also includes withdrawing the tip from the substrate in a second direction that is substantially opposite to the first direction. The method further includes moving at least one of the tip and the substrate laterally relative to each other. In addition, the method also includes plunging the tip into the substrate at a second location in a third direction that is substantially parallel to the first direction, thereby displacing a second portion of the substrate with the tip and withdrawing the tip from the substrate in a fourth direction that is substantially opposite to the third direction.
公开/授权文献
- US20090070979A1 Vertical indent production repair 公开/授权日:2009-03-19
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