发明授权
- 专利标题: Method to optimize substrate thickness for image sensor device
- 专利标题(中): 优化图像传感器设备基板厚度的方法
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申请号: US12371146申请日: 2009-02-13
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公开(公告)号: US07838325B2公开(公告)日: 2010-11-23
- 发明人: Tzu-Hsuan Hsu , Alex Hsu , Ching-Chun Wang
- 申请人: Tzu-Hsuan Hsu , Alex Hsu , Ching-Chun Wang
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Provided is a method for fabricating an image sensor device that includes providing a substrate having a front side and a back side; patterning a photoresist on the front side of the substrate to define an opening having a first width, the photoresist having a first thickness correlated to the first width; performing an implantation process through the opening using an implantation energy correlated to the first thickness thereby forming a first doped isolation feature; forming a light sensing feature adjacent to the first doped isolation feature, the light sensing feature having a second width; and thinning the substrate from the back side so that the substrate has a second thickness that does not exceed twice a depth of the first doped isolation feature. A pixel size is substantially equal to the first and second widths.