发明授权
US07838963B2 Electrical fuse having a fully silicided fuselink and enhanced flux divergence
有权
电熔丝具有完全硅化的富熔体和增强的焊剂分散
- 专利标题: Electrical fuse having a fully silicided fuselink and enhanced flux divergence
- 专利标题(中): 电熔丝具有完全硅化的富熔体和增强的焊剂分散
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申请号: US11925164申请日: 2007-10-26
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公开(公告)号: US07838963B2公开(公告)日: 2010-11-23
- 发明人: Dureseti Chidambarrao , William K. Henson , Deok-Kee Kim , Chandrasekharan Kothandaraman
- 申请人: Dureseti Chidambarrao , William K. Henson , Deok-Kee Kim , Chandrasekharan Kothandaraman
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Joseph P. Abate, Esq.
- 主分类号: H01L29/86
- IPC分类号: H01L29/86
摘要:
A contiguous block of a stack of two heterogeneous semiconductor layers is formed over an insulator region such as shallow trench isolation. A portion of the contiguous block is exposed to an etch, while another portion is masked during the etch. The etch removes an upper semiconductor layer selective to a lower semiconductor layer in the exposed portion. The etch mask is removed and the entirety of the lower semiconductor layer within the exposed region is metallized. A first metal semiconductor alloy vertically abutting the insulator region is formed, while exposed surfaces of the stack of two heterogeneous semiconductor layers, which comprises the materials of the upper semiconductor layer, are concurrently metallized to form a second metal semiconductor alloy. An inflection point for current and, consequently, a region of flux divergence are formed at the boundary of the two metal semiconductor alloys.
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