Invention Grant
- Patent Title: Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments
- Patent Title (中): 用于在恶劣环境中工作的电离计中屏蔽馈通绝缘子的方法和装置
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Application No.: US12313778Application Date: 2008-11-24
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Publication No.: US07847559B2Publication Date: 2010-12-07
- Inventor: Richard A. Knott
- Applicant: Richard A. Knott
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L21/30
- IPC: G01L21/30 ; H01J1/53

Abstract:
Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.
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