公开(公告)号：US07429863B2

公开(公告)日：2008-09-30

申请号：US11488457

申请日：2006-07-18

Applicant: Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

Inventor： Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

IPC: G01N27/62 ,  G01L21/30

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

Abstract translation: 提供了用于操作多热阴极电离计的方法和装置，以增加气态过程环境中电离计的使用寿命。 在示例实施例中，通过将备用阴极加热到不足以发射电子的温度来延长备用阴极的寿命，但足以减少沉积在其表面上的材料的量或被优化以降低其间的化学相互作用 处理气体和所述至少一个备用阴极的材料。 备用阴极可以不断地或周期性地加热。 在其他实施例中，在工艺压力通过给定压力阈值之后，可以将多个阴极加热到非发光温度，多个阴极可以被加热到较低的发光温度，或者可以将发射阴极加热到降低 电子发射电流。

公开(公告)号：US20090015264A1

公开(公告)日：2009-01-15

申请号：US11827370

申请日：2007-07-11

Applicant: Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

Inventor： Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

IPC: G01L21/34

CPC classification number: G01L21/34 ,  H01J41/02

Abstract: An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge.

Abstract translation: 一种电离计，消除热阴极或灯丝，但保持接近热阴极电离计的气体密度测量精度水平。 电离计包括设置在离子化体积中的集电极，不具有加热阴极的电子源和调节电子源和电离体积之间的电子流的静电快门。 基于来自限定电离体积的阳极的反馈，静电快门控制电子流。 电子源可以是Penning或辉光放电电离计。

公开(公告)号：US20080315887A1

公开(公告)日：2008-12-25

申请号：US12229271

申请日：2008-08-21

Applicant: Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

Inventor： Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

IPC: G01L21/30

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

公开(公告)号：US07847559B2

公开(公告)日：2010-12-07

申请号：US12313778

申请日：2008-11-24

Applicant: Richard A. Knott

Inventor： Richard A. Knott

IPC: G01L21/30 ,  H01J1/53

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

Abstract translation: 提供了用于热阴极电离计的馈通针绝缘子的屏蔽，以增加电离计在有害工艺环境中的使用寿命。 根据仪表设计和其他因素，可以采用各种屏蔽材料，设计和构造。 在一个实施例中，屏蔽件可以包括孔，通过该孔可插入馈通引脚和间隔件，以在屏蔽件附接到量规之前在屏蔽件和馈通销绝缘体之间提供最佳距离。 屏蔽件还可以包括用于将屏蔽件附接到量规的部件的突出部，例如量规的馈通引脚。 通过使用绝缘体屏蔽的示例性实施例，电离计的寿命通过防止来自真空室中的过程的气体产物或从电离计溅射的材料沉积在馈通销绝缘体上并导致来自量规的电泄漏 电极。

公开(公告)号：US07456634B2

公开(公告)日：2008-11-25

申请号：US11588109

申请日：2006-10-26

Applicant: Richard A. Knott

Inventor： Richard A. Knott

IPC: G01L21/30 ,  H01J1/53

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

公开(公告)号：US20080018337A1

公开(公告)日：2008-01-24

申请号：US11488457

申请日：2006-07-18

Applicant: Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

Inventor： Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

IPC: G01L21/30

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

公开(公告)号：US07768267B2

公开(公告)日：2010-08-03

申请号：US11827370

申请日：2007-07-11

Applicant: Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

Inventor： Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

IPC: G01L21/30 ,  G01L21/32 ,  H05B31/26

CPC classification number: G01L21/34 ,  H01J41/02

Abstract: An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge.

Abstract translation: 一种电离计，消除热阴极或灯丝，但保持接近热阴极电离计的气体密度测量精度水平。 电离计包括设置在离子化体积中的集电极，不具有加热阴极的电子源和调节电子源与电离体积之间的电子流的静电快门。 基于来自限定电离体积的阳极的反馈，静电快门控制电子流。 电子源可以是Penning或辉光放电电离计。

公开(公告)号：US07656165B2

公开(公告)日：2010-02-02

申请号：US12229271

申请日：2008-08-21

Applicant: Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

Inventor： Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

IPC: G01N27/62 ,  G01L21/30

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

Abstract translation: 提供了用于操作多热阴极电离计的方法和装置，以增加气态过程环境中电离计的使用寿命。 在示例实施例中，通过将备用阴极加热到不足以发射电子的温度来延长备用阴极的寿命，但足以减少沉积在其表面上的材料的量或被优化以降低其间的化学相互作用 处理气体和所述至少一个备用阴极的材料。 备用阴极可以不断地或周期性地加热。 在其他实施例中，在工艺压力通过给定压力阈值之后，可以将多个阴极加热到非发光温度，多个阴极可以被加热到较低的发光温度，或者可以将发射阴极加热到降低 电子发射电流。

公开(公告)号：US20090146665A1

公开(公告)日：2009-06-11

申请号：US12313778

申请日：2008-11-24

Applicant: Richard A. Knott

Inventor： Richard A. Knott

IPC: H01R13/648 ,  G01L21/30 ,  H01R43/00

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

Abstract translation: 提供了用于热阴极电离计的馈通针绝缘子的屏蔽，以增加电离计在有害工艺环境中的使用寿命。 根据仪表设计和其他因素，可以采用各种屏蔽材料，设计和构造。 在一个实施例中，屏蔽件可以包括孔，通过该孔可插入馈通引脚和间隔件，以在屏蔽件附接到量规之前在屏蔽件和馈通销绝缘体之间提供最佳距离。 屏蔽件还可以包括用于将屏蔽件附接到量规的部件的突出部，例如量规的馈通引脚。 通过使用绝缘体屏蔽的示例实施例，电离计的寿命通过防止来自真空室中的过程的气体产物或从电离计溅射的材料沉积在馈通销绝缘体上并导致来自量规的电泄漏 电极。

公开(公告)号：US20080100301A1

公开(公告)日：2008-05-01

申请号：US11588109

申请日：2006-10-26

Applicant: Richard A. Knott

Inventor： Richard A. Knott

IPC: G01L21/30

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

Abstract translation: 提供了用于热阴极电离计的馈通针绝缘子的屏蔽，以增加电离计在有害工艺环境中的使用寿命。 根据仪表设计和其他因素，可以采用各种屏蔽材料，设计和构造。 在一个实施例中，屏蔽件可以包括孔，通过该孔可插入馈通引脚和间隔件，以在屏蔽件附接到量规之前在屏蔽件和馈通销绝缘体之间提供最佳距离。 屏蔽件还可以包括用于将屏蔽件附接到量规的部件的突出部，例如量规的馈通引脚。 通过使用绝缘体屏蔽的示例性实施例，电离计的寿命通过防止来自真空室中的过程的气体产物或从电离计溅出的材料沉积在馈通销绝缘体上并导致来自量规的电泄漏 电极。