Invention Grant
- Patent Title: Method of improving corrosion resistance of stainless steel surfaces by a process of passivation
- Patent Title (中): 通过钝化工艺提高不锈钢表面的耐腐蚀性的方法
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Application No.: US11582748Application Date: 2006-10-17
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Publication No.: US07850786B2Publication Date: 2010-12-14
- Inventor: Mark Crockett , John W. Lane , Micahel DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe N. Mohammed
- Applicant: Mark Crockett , John W. Lane , Micahel DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe N. Mohammed
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Shirley L. Church
- Main IPC: C23G1/00
- IPC: C23G1/00 ; C23G1/08 ; C23G1/14 ; C23G1/19 ; B08B3/08 ; B08B3/10
Abstract:
Described is a space-conserving integrated fluid delivery system particularly useful for gas distribution in semiconductor processing equipment. The system includes integrated fluid flow network architecture, and may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded. Subsequent to diffusion bonding, a stainless steel diffusion bonded part may advantageously be treated to enhance corrosion resistance using a series of steps designed to bring more chromium to the surface of the steel.
Public/Granted literature
- US20070062909A1 Method of improving corrosion resistance of stainless steel surfaces by a process of passivation Public/Granted day:2007-03-22
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