Invention Grant
- Patent Title: Method for obtaining information and device therefor
- Patent Title (中): 获取信息的方法及其设备
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Application No.: US12017584Application Date: 2008-01-22
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Publication No.: US07851749B2Publication Date: 2010-12-14
- Inventor: Manabu Komatsu , Hiroyuki Hashimoto , Yohei Murayama , Kazuhiro Ban
- Applicant: Manabu Komatsu , Hiroyuki Hashimoto , Yohei Murayama , Kazuhiro Ban
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-021437 20070131
- Main IPC: H01J49/00
- IPC: H01J49/00

Abstract:
A method for obtaining information on a mass of an object by time-of-flight mass spectrometry. This method includes placing colloidal metal particles for promoting ionization of the object inside the object at a depth ranging from 0.1 nm to 100 nm in opposition to a primary beam for the ionization; irradiating the object with the primary beam selected from the group of ions, neutral particles, and electrons, which can be focused, pulsed, and are capable of scanning, and laser beams, which can be focused, pulsed, and are capable of scanning to ionize a constituent of the object and to allow the ionized constituent to fly out of the object; and obtaining information on the mass of the flying constituent of the object by time-of-flight mass spectrometry.
Public/Granted literature
- US20080179512A1 METHOD FOR OBTAINING INFORMATION AND DEVICE THEREFOR Public/Granted day:2008-07-31
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