发明授权
- 专利标题： Rotating contact element and methods of fabrication
- 专利标题（中）： 旋转接触元件和制造方法
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申请号： US11617394申请日： 2006-12-28
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公开(公告)号： US07851794B2公开(公告)日： 2010-12-14
- 发明人: Eric D. Hobbs
- 申请人： Eric D. Hobbs
- 申请人地址： US CA Livermore
- 专利权人： FormFactor, Inc.
- 当前专利权人： FormFactor, Inc.
- 当前专利权人地址： US CA Livermore
- 代理机构： Kirton & McConkie
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
Rotating contact elements and methods of fabrication are provided herein. In one embodiment, a rotating contact element includes a tip having a first side configured to contact a device to be tested and an opposing second side; and a plurality of deformed members extending from the second side of the tip and arranged about a central axis thereof, wherein the tip rotates substantially about the central axis upon compression of the plurality of deformed members.
公开/授权文献
- US20080157789A1 ROTATING CONTACT ELEMENT AND METHODS OF FABRICATION 公开/授权日：2008-07-03