发明授权
US07855094B2 Photo-detector for detecting image signal of infrared laser radar and method of manufacturing the same
失效
用于检测红外激光雷达图像信号的光电检测器及其制造方法
- 专利标题: Photo-detector for detecting image signal of infrared laser radar and method of manufacturing the same
- 专利标题(中): 用于检测红外激光雷达图像信号的光电检测器及其制造方法
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申请号: US12428575申请日: 2009-04-23
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公开(公告)号: US07855094B2公开(公告)日: 2010-12-21
- 发明人: Eun Soo Nam , Seon Eui Hong , Myoung Sook Oh , Yong Won Kim , Ho Young Kim , Bo Woo Kim
- 申请人: Eun Soo Nam , Seon Eui Hong , Myoung Sook Oh , Yong Won Kim , Ho Young Kim , Bo Woo Kim
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Ladas & Parry LLP
- 优先权: KR10-2005-0121973 20051212
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A photo-detector, in which metal wiring for connecting electrodes is arranged on a planarized surface and thus the metal wiring arrangement is simplified, and a method of manufacturing the same are provided. The photo-detector includes a multi-layer compound semiconductor layer formed on a compound semiconductor substrate. A number of p-n junction diodes are arranged in a regular order in a selected region of the compound semiconductor layer, and an isolation region for individually isolating the p-n junction diodes is formed by implanting impurity ions in the multi-layer compound semiconductor layer. The isolation region and the surface of the compound semiconductor layer are positioned on the same level. The isolation region may be a Fe-impurity region.
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