Invention Grant
US07855094B2 Photo-detector for detecting image signal of infrared laser radar and method of manufacturing the same
失效
用于检测红外激光雷达图像信号的光电检测器及其制造方法
- Patent Title: Photo-detector for detecting image signal of infrared laser radar and method of manufacturing the same
- Patent Title (中): 用于检测红外激光雷达图像信号的光电检测器及其制造方法
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Application No.: US12428575Application Date: 2009-04-23
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Publication No.: US07855094B2Publication Date: 2010-12-21
- Inventor: Eun Soo Nam , Seon Eui Hong , Myoung Sook Oh , Yong Won Kim , Ho Young Kim , Bo Woo Kim
- Applicant: Eun Soo Nam , Seon Eui Hong , Myoung Sook Oh , Yong Won Kim , Ho Young Kim , Bo Woo Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Ladas & Parry LLP
- Priority: KR10-2005-0121973 20051212
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A photo-detector, in which metal wiring for connecting electrodes is arranged on a planarized surface and thus the metal wiring arrangement is simplified, and a method of manufacturing the same are provided. The photo-detector includes a multi-layer compound semiconductor layer formed on a compound semiconductor substrate. A number of p-n junction diodes are arranged in a regular order in a selected region of the compound semiconductor layer, and an isolation region for individually isolating the p-n junction diodes is formed by implanting impurity ions in the multi-layer compound semiconductor layer. The isolation region and the surface of the compound semiconductor layer are positioned on the same level. The isolation region may be a Fe-impurity region.
Public/Granted literature
- US20090239328A1 PHOTO-DETECTOR FOR DETECTING IMAGE SIGNAL OF INFRARED LASER RADAR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-09-24
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