发明授权
- 专利标题： Microactuator substrate
- 专利标题（中）： 微致动器基板
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申请号： US11701274申请日： 2007-01-31
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公开(公告)号： US07855489B2公开(公告)日： 2010-12-21
- 发明人: Toshiki Hirano
- 申请人： Toshiki Hirano
- 申请人地址： NL Amsterdam
- 专利权人： Hitachi Global Storage Technologies, Netherlands, B.V.
- 当前专利权人： Hitachi Global Storage Technologies, Netherlands, B.V.
- 当前专利权人地址： NL Amsterdam
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
The substrate includes a stroke amplifier for generating an amount of amplified motion converted from a force received thereon. The substrate also includes a rotating device coupled to the stroke amplifier, the rotating device comprising supporting rotational springs. The rotating device is separate and independent from the stroke amplifier and has a center of rotation substantially proximal to a center of mass of an object disposable thereon. The rotating device causes a rotation in a portion of the substrate upon receiving said amplified motion. The substrate further includes a piezoelectric actuator that is coupled to the stroke amplifier and is for generating the force. The stroke amplifier and the rotating device are integrated within the substrate.