- 专利标题: Developing method and developing unit
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申请号: US12216751申请日: 2008-07-10
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公开(公告)号: US07857530B2公开(公告)日: 2010-12-28
- 发明人: Yuko Ono , Junichi Kitano
- 申请人: Yuko Ono , Junichi Kitano
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Rader, Fishman & Graucer PLLC
- 优先权: JP2002-056563 20020301; JP2002-056642 20020301; JP2002-056665 20020301
- 主分类号: G03D5/00
- IPC分类号: G03D5/00 ; G03C5/00 ; B08B3/12
摘要:
In a developing method for performing developing treatment of a substrate by supplying a developing solution onto a resist film formed on a surface of the substrate, the present invention controls a zeta potential of the surface of the substrate at a predetermined potential in the same polarity as that of a zeta potential of insoluble substances floating in the developing solution, thereby preventing or reducing the adhesion of the insoluble substances to the resist film and the substrate. This remedies the occurrence of development defects. The adhesion of the insoluble substances to the resist film and the substrate can also be prevented or inhibited by supplying an acid liquid to a liquid on the substrate, or controlling a pH value of the liquid on the substrate to control an absolute value of the zeta potential of the insoluble substances.
公开/授权文献
- US20080284989A1 Developing method and developing unit 公开/授权日:2008-11-20
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