发明授权
US07857570B2 Method and apparatus for supplying substrates to a processing tool
有权
用于将基材供给到加工工具的方法和装置
- 专利标题： Method and apparatus for supplying substrates to a processing tool
- 专利标题（中）： 用于将基材供给到加工工具的方法和装置
-
申请号： US12100388申请日： 2008-04-09
-
公开(公告)号： US07857570B2公开(公告)日： 2010-12-28
- 发明人: Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
- 申请人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Dugan & Dugan
- 主分类号： B65G49/07
- IPC分类号： B65G49/07
摘要：
In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.
公开/授权文献
信息查询
IPC分类:
