发明授权
- 专利标题: Integrated circuit layout design
- 专利标题(中): 集成电路布局设计
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申请号: US12356405申请日: 2009-01-20
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公开(公告)号: US07862962B2公开(公告)日: 2011-01-04
- 发明人: Ming-Feng Shieh , Shinn-Sheng Yu , Anthony Yen , Shao-Ming Yu , Chang-Yun Chang , Jeff J. Xu , Clement Hsingjen Wann
- 申请人: Ming-Feng Shieh , Shinn-Sheng Yu , Anthony Yen , Shao-Ming Yu , Chang-Yun Chang , Jeff J. Xu , Clement Hsingjen Wann
- 申请人地址: TW Hsin-chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: G03F9/00
- IPC分类号: G03F9/00 ; G03C5/00
摘要:
Provided is a method including layout design of an integrated circuit. A first pattern is provided. The first pattern includes an array of dummy line features and a plurality of spacer elements abutting the dummy line features. A second pattern is provided. The second pattern defines an active region of an integrated circuit device. An edge spacer element of the active region is determined. A dummy line feature of the array of dummy line features is biased (e.g., increased in width), the dummy line feature is adjacent an edge spacer element.
公开/授权文献
- US20100183961A1 INTEGRATED CIRCUIT LAYOUT DESIGN 公开/授权日:2010-07-22
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